04381nam a22004575i 4500001001800000003000900018005001700027007001500044008004100059020001800100020001900118024002500137040000900162100002700171245012400198264003800322300003400360336002600394337002600420338003900446347002400485490006600509505101700575520175501592650001503347650001703362650002303379650002003402650002403422650001503446650002003461650005003481650003803531650005503569650005003624710003403674773002003708776003603728830006603764856009303830978-0-387-23319-2DE-He21320260521091826.0cr nn 008mamaa100301s2005    xxu|    s    |||| 0|eng d  a9780387233192  a997803872331927 a10.1007/b1012002doi  cCICY1 aSetter, Nava.eeditor.10aElectroceramic-Based MEMSh[recurso electrónico] :bFabrication-Technology and Applications /cedited by Nava Setter. 1aBoston, MA :bSpringer US,c2005.  aXII, 414 p.bonline resource.  atextbtxt2rdacontent  acomputerbc2rdamedia  arecurso en líneabcr2rdacarrier  atext filebPDF2rda1 aElectronic Materials: Science and Technology,x1386-3290 ;v90 aApplications and Devices -- MEMS-Based Thin Film and Resonant Chemical Sensors -- Microactuators Based on Thin Films -- Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films -- Thick-Film Piezoelectric and Magnetostrictive Devices -- Micromachined Infrared Detectors Based on Pyroelectric Thin Films -- RF Bulk Acoustic Wave Resonators and Filters -- High Frequency Tuneable Devices Based on Thin Ferroelectric Films -- MEMS for Optical Functionality -- Materials, Fabrication-Technology, and Functionality -- Ceramic Thick Films for MEMS -- Thin Film Piezoelectrics for MEMS -- Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices -- Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics -- Microfabrication of Piezoelectric MEMS -- Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics -- Low-Cost Patterning of Ceramic Thin Films.  aThe book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added. 0aCHEMISTRY. 0aELECTRONICS. 0aOPTICAL MATERIALS. 0aNANOTECHNOLOGY. 0aSURFACES (PHYSICS).14aCHEMISTRY.24aNANOTECHNOLOGY.24aCERAMICS, GLASS, COMPOSITES, NATURAL METHODS.24aOPTICAL AND ELECTRONIC MATERIALS.24aELECTRONICS AND MICROELECTRONICS, INSTRUMENTATION.24aCHARACTERIZATION AND EVALUATION OF MATERIALS.2 aSpringerLink (Online service)0 tSpringer eBooks08iPrinted edition:z9780387233109 0aElectronic Materials: Science and Technology,x1386-3290 ;v940uhttp://dx.doi.org/10.1007/b101200zVer el texto completo en las instalaciones del CICY