@book{32115,
	author = {Setter, Nava. and SpringerLink (Online service)},
	title = {Electroceramic-Based MEMS},
	publisher = {Springer US,},
	year = {2005.},
	series = {Electronic Materials: Science and Technology,},
	address = {Boston, MA :},
	url = {http://dx.doi.org/10.1007/b101200}
}